EPI-scrubber


Control system for EPI-scrubber

Planning, programming, delivery and commissioning of Control system for emission control system consisting of 3 chambers of epitaxy.
EPI-scrubbers are specifically matched to resulting gases that are produced with the process of epitaxy.

The production of the Control system and the system wiring was done by a partner company.
As a Control system, a S7-300 was used, the Profibus connection to the control room was done via a CP342.

 

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